Study of the Stability and Hydrophilicity of Plasma-Modified Microfluidic Materials

Polymers among new classes of materials such as polydimethylsiloxane (PDMS), cyclic olefin copolymer (COC), Norland optical adhesive (NOA), and THV (fluoropolymer) were evaluated as surface-modified microfluidic materials, including investigating the incorporation of silica-like functional groups onto these surfaces. The functionalization of these materials was performed using a hybrid reactor equipped with magnetron sputtering using a silica target and with a PECVD apparatus starting from hexamethyldisiloxane as a chemical precursor. Coated microfluidic materials were then evaluated in terms of wettability, stability, composition, and structure. The deposited coatings were proved to be stable up to 2 month in air and water storage for these materials, with COC providing the most stable substrate.