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Gorbachev, Y. E., Zatevakhin, M. A., Ignatiev, A. A., & Krzhizhanovskaya, V. V. (2004). Simulation of heat and mass transfer processes in PECVD reactors for silicon films growth under the conditions of intense formation of higher silanes in the gas phase. In The 5th Minsk International Heat and Mass Transfer Forum, MIF-2004, Book of Abstracts (Vol. 1, pp. 301-302) http://relay.itmo.by/forum/mif5/S04/4-08.pdf
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