Sputtering on He cooled substrate: a new method for producing nanometer-size materials
| Authors |
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| Publication date | 1996 |
| Journal | Materials Science & Engineering. A, Structural Materials, Properties, Microstructure and Processing |
| Volume | Issue number | 217/218 |
| Pages (from-to) | 227-231 |
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| Document type | Article |
| Published at |
https://doi.org/10.1016/S0921-5093(96)10359-2
(Final published version)
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