Oxygen and erbium related donor centers in Czochralski grown silicon implanted with erbium,

Authors
  • V. Emtsev
  • V.V. Emtsev Jr.
  • D.S. Poloskin
  • E.I. Shek
  • N.A. Sobolev
  • J. Michel
  • L.C. Kimerling
Publication date 1999
Journal Fizika i tehnika poluprovodnikov
Volume | Issue number 33
Pages (from-to) 1192-1195
Organisations
  • Faculty of Science (FNWI) - Institute of Physics (IoP) - Van der Waals-Zeeman Institute (WZI)
Document type Article
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