Failure mechanisms of pressurized microchannels, model and experiments

Authors
  • M.T. Blom
  • N.R. Tas
  • G. Pandraud
  • E. Chmela
  • J.G.E. Gardeniers
  • R. Tijssen
  • M. Elwenspoek
  • A. van den Berg
Publication date 2000
Journal Microelectromech. Eng.
Organisations
  • Faculty of Science (FNWI) - Van 't Hoff Institute for Molecular Sciences (HIMS)
Document type Article
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