Anomalous Time-of-Flight Distributions Observed for Argon Implanted in Silicon and Resputtered by Ar+-Ion Bombardment

Open Access
Authors
  • G.N.A. van Veen
  • A. van Veen
  • D.J. Oostra
  • A.E. de Vries
Publication date 1986
Journal Physical Review Letters
Volume | Issue number 57 | 6
Pages (from-to) 739-742
Organisations
  • Faculty of Science (FNWI)
Document type Article
Note ©1986 American Physical Society
Published at https://doi.org/10.1103/PhysRevLett.57.739
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