Model development of a PECVD reactor for titanium dioxide film deposition [in Russian]
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| Publication date | 2009 |
| Book title | International Conference "38th Science Week" |
| Event | International Conference "38th Science Week", Saint Petersburg, Russia |
| Pages (from-to) | 56-57 |
| Publisher | Saint Petersburg, Russia: Saint Petersburg State Polytechnic University |
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| Document type | Conference contribution |
| Note | Baryshnikova2009a In Russian |
| Language | Russian |
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