Shallow thermal donors in annealed CZ silicon and links to the NL10 spectrum: the relevance of H, Al and N impurities

Authors
  • R.C. Newman
  • M.J. Ashwin
  • R.E. Pritchard
  • J.H. Tucker
  • E.C. Lightowlers
  • T. Gregorkiewicz
  • I.S. Zevenbergen
  • C.A.J. Ammerlaan
  • R. Falster
  • M.J. Binns
Publication date 1997
Journal Materials Science Forum
Volume | Issue number 258-263
Pages (from-to) 379-384
Organisations
  • Faculty of Science (FNWI) - Institute of Physics (IoP) - Van der Waals-Zeeman Institute (WZI)
Document type Article
Language English
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