A comparative study of donor formation in dysprosium, holmium, and erbium implanted silicon,
| Authors |
|
|---|---|
| Publication date | 1999 |
| Journal | Journal of Luminescence |
| Volume | Issue number | 80 |
| Pages (from-to) | 391-394 |
| Organisations |
|
| Document type | Article |
| Published at |
https://doi.org/10.1016/S0022-2313(98)00135-5
(Final published version)
|
| Permalink to this page | |