A low hydraulic capacitance pressure sensor for integration with a micro viscosity detector

Authors
  • F.H.J. van der Heyden
  • M.T. Blom
  • J.G.E. Gardeniers
  • E. Chmela
  • M. Elwenspoek
  • R. Tijssen
  • A. van den Berg
Publication date 2003
Journal Sensors and Actuators. B, Chemical
Volume | Issue number 92
Pages (from-to) 102-109
Organisations
  • Faculty of Science (FNWI) - Van 't Hoff Institute for Molecular Sciences (HIMS)
Document type Article
Published at
Permalink to this page
Back