Developing a model of nickel film growth in a PECVD reactor [in Russian]
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| Publication date | 2009 |
| Book title | International Conference "38th Science Week" |
| Event | International Conference "38th Science Week", Saint Petersburg, Russia |
| Pages (from-to) | 59-60 |
| Publisher | Saint Petersburg, Russia: Saint Petersburg State Polytechnic University |
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| Document type | Conference contribution |
| Note | Zverev2009a In Russian |
| Language | Russian |
| Permalink to this page | |
