Fabrication and characterization of p-type silicon field-emitter arrays for lithography

Open Access
Authors
  • T.F. Teepen
  • A.H.V. van Veen
  • H. van 't Spijker
  • S.W.H.K. Steenbrink
  • A. van Zuuk
  • C.T.H. Heerkens
  • M.J. Wieland
  • N.J. van Druten
  • P. Kruit
Publication date 2005
Journal Journal of Vacuum Science & Technology B
Volume | Issue number 23 | 2
Pages (from-to) 359-369
Organisations
  • Faculty of Science (FNWI) - Institute of Physics (IoP) - Van der Waals-Zeeman Institute (WZI)
Document type Article
Language English
Published at https://doi.org/10.1116/1.1861045
Downloads
jvstb23-359.pdf (Final published version)
Permalink to this page
Back