Effects of oxygen coimplantation on the formation of donor centers in erbium-implanted silicon

Authors
  • V. Emtsev
  • D.S. Poloskin
  • E.I. Shek
  • N.A. Sobolev
  • L.C. Kimerling
Publication date 2001
Journal Materials Science and Engineering B-Advanced Functional Solid-State Materials
Volume | Issue number 81 | (1-3)
Pages (from-to) 74-76
Organisations
  • Faculty of Science (FNWI) - Institute of Physics (IoP) - Van der Waals-Zeeman Institute (WZI)
Document type Article
Published at
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