Simulation of heat and mass transfer processes in PECVD reactors for silicon films growth under the conditions of intense formation of higher silanes in the gas phase

Authors
Publication date 2004
Book title The 5th Minsk International Heat and Mass Transfer Forum, MIF-2004, Book of Abstracts
Volume | Issue number 1
Pages (from-to) 301-302
Organisations
  • Faculty of Science (FNWI) - Informatics Institute (IVI)
Document type Conference contribution
Published at
Permalink to this page
Back