Simulation of heat and mass transfer processes in PECVD reactors for silicon films growth under the conditions of intense formation of higher silanes in the gas phase
| Authors |
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| Publication date |
2004
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| Book title |
The 5th Minsk International Heat and Mass Transfer Forum, MIF-2004, Book of Abstracts
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| Volume | Issue number |
1
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| Pages (from-to) |
301-302
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| Organisations |
-
Faculty of Science (FNWI) - Informatics Institute (IVI)
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| Document type |
Conference contribution
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| Published at |
http://relay.itmo.by/forum/mif5/S04/4-08.pdf
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