3D mesh generation for the results of anisotropic etch simulation

Authors
  • E.V. Zudilova-Seinstra
  • M.O. Borisov
Publication date 2002
Host editors
  • P.M.A. Sloot
  • C.J.K. Tan
  • J.J. Dongarra
  • A.G. Hoekstra
Book title Computational Science - ICCS 2002, Proceedings Part I
ISBN
  • 3540435913
  • 9783540435914
Volume | Issue number 2329
Pages (from-to) 316-323
Publisher Springer Verlag
Organisations
  • Faculty of Science (FNWI) - Informatics Institute (IVI)
Document type Conference contribution
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