Modeling of Plasma Chemical Deposition and Degradation of Silicon Thin Films

Authors
Publication date 2006
Host editors
  • E.E. Gdoutos
Book title Fracture of Nano and Engineering Materials and Structures
Book subtitle proceedings of the 16th European Conference of Fracture, Alexandroupolis, Greece, July 3–7, 2006
ISBN
  • 9781402049712
ISBN (electronic)
  • 9781402049729
Pages (from-to) 1347-1348
Publisher Dordrecht: Springer
Organisations
  • Faculty of Science (FNWI) - Informatics Institute (IVI)
Document type Conference contribution
Note Krzhizhanovskaya2006a abstract
Language English
Published at
https://doi.org/10.1007/1-4020-4972-2_669 (Final published version)
Published at
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