Modeling of Plasma Chemical Deposition and Degradation of Silicon Thin Films
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| Publication date | 2006 |
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| Book title | Fracture of Nano and Engineering Materials and Structures |
| Book subtitle | proceedings of the 16th European Conference of Fracture, Alexandroupolis, Greece, July 3–7, 2006 |
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| ISBN (electronic) |
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| Pages (from-to) | 1347-1348 |
| Publisher | Dordrecht: Springer |
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| Document type | Conference contribution |
| Note | Krzhizhanovskaya2006a abstract |
| Language | English |
| Published at | https://doi.org/10.1007/1-4020-4972-2_669 |
| Published at | http://www.science.uva.nl/research/scs/papers/archive/Krzhizhanovskaya2006a.pdf |
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