J.B. van den Berg
Y. van Gennip
M. van der Schans
S. van der Stelt
M. Vargas Rivera
- Some studies on the deformation of the membrane in an RF MEMS switch
- 63rd European Study Group Mathematics with Industry, Enschede, the Netherlands
- Book/source title
- Proceedings of the sixty-third European Study Group Mathematics with Industry: Enschede, the Netherlands, 28 January - 1 February, 2008
- Pages (from-to)
- Amsterdam: Centrum voor Wiskunde en Informatica
- Document type
- Conference contribution
- Faculty of Science (FNWI)
- Korteweg-de Vries Institute for Mathematics (KdVI)
Radio Frequency (RF) switches of Micro Electro Mechanical Systems (MEMS) are appealing to the mobile industry because of their energy efficiency and ability to accommodate more frequency bands. However, the electromechanical coupling of the electrical circuit to the mechanical components in RF MEMS switches is not fully understood.
In this paper, we consider the problem of mechanical deformation of electrodes in RFMEMS switch due to the electrostatic forces caused by the difference in voltage between the electrodes. It is known from previous studies of this problem, that the solution exhibits multiple deformation states for a given electrostatic force. Subsequently, the capacity of the switch that depends on the deformation of electrodes displays a hysteresis behaviour against the voltage in the switch.
We investigate the present problem along two lines of attack. First, we solve for the deformation states of electrodes using numerical methods such as finite difference and shooting methods. Subsequently, a relationship between capacity and voltage of the RFMEMS switch is constructed. The solutions obtained are exemplified using the continuation and bifurcation package AUTO. Second, we focus on the analytical methods for a simplified version of the problem and on the stability analysis for the solutions of deformation states. The stability analysis shows that there exists a continuous path of equilibrium deformation states between the open and closed state.
If you believe that digital publication of certain material infringes any of your rights or (privacy) interests, please let the Library know, stating your reasons. In case of a legitimate complaint, the Library will make the material inaccessible and/or remove it from the website. Please Ask the Library, or send a letter to: Library of the University of Amsterdam, Secretariat, Singel 425, 1012 WP Amsterdam, The Netherlands. You will be contacted as soon as possible.