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Query: faculty: "FNWI" and publication year: "2008"

AuthorV.V. Krzhizhanovskaya
TitleA virtual reactor for simulation of plasma enhanced chemical vapor deposition
PromotorP.M.A. Sloot
Co-promotorY.E. Gorbachev
Date20-06-2008
Year2008
Pages116
ISBN9789090231662
FacultyFaculty of Science
Institute/dept.FNWI: Informatics Institute (II)
Keywordssimulation ; plasma enhanced chemical vapor deposition ; PECVD ; problem solving environment ; PSE ; virtual reactor ; parallel distributed computing ; grid ; Microelectronics, Production, Simulation models
Classification58.15 chemical reactors
LanguageEnglish
Document typeDissertation
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